University of Idaho Cleanroom

The University of Idaho Cleanroom is a low maintenance facility that is capable of producing simple devices. It is a Class 1000 cleanroom with Class 100 workstations. The following capabilities exist:

  • Photoresist spinner and curing capabilities
  • Photolithography system capable of 5 um features
  • Wet etch capabilities
  • Metal sputter system for Au contacts
  • Reactive Ion Etcher (coming online)
  • TEOS silicon oxide film deposition

The image to the left are the photoresist/curing/etching stations and the image on the right is the profilometer and mask aligner in the foregroung.

The image to the left is a dual head DC sputter system for putting down metal contacts. The image to the right is a reactive ion etcher that is being calibrated and will soon be placed next to the sputter system in the left hand image.

The University of Idaho Cleanroom is simple, but cost effective and gets the job done. Undergraduate and graduate students receive training on the basics of microfabrication. The facility is also available for use by outsiders on a fee basis.

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